JPH0648397Y2 - 検査装置 - Google Patents
検査装置Info
- Publication number
- JPH0648397Y2 JPH0648397Y2 JP16654388U JP16654388U JPH0648397Y2 JP H0648397 Y2 JPH0648397 Y2 JP H0648397Y2 JP 16654388 U JP16654388 U JP 16654388U JP 16654388 U JP16654388 U JP 16654388U JP H0648397 Y2 JPH0648397 Y2 JP H0648397Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- sample
- specimen
- pressing
- pressing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title claims description 18
- 239000013013 elastic material Substances 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16654388U JPH0648397Y2 (ja) | 1988-12-23 | 1988-12-23 | 検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16654388U JPH0648397Y2 (ja) | 1988-12-23 | 1988-12-23 | 検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0288103U JPH0288103U (en]) | 1990-07-12 |
JPH0648397Y2 true JPH0648397Y2 (ja) | 1994-12-12 |
Family
ID=31454018
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16654388U Expired - Lifetime JPH0648397Y2 (ja) | 1988-12-23 | 1988-12-23 | 検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648397Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH084600Y2 (ja) * | 1990-05-14 | 1996-02-07 | エヌオーケー株式会社 | 外観検査用治具 |
-
1988
- 1988-12-23 JP JP16654388U patent/JPH0648397Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0288103U (en]) | 1990-07-12 |
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